Rotor System
The power core of a dry vacuum pump is a precisely fitted rotor assembly, typically consisting of two to three helical or claw-shaped rotors. These high-precision metal rotors mesh with one another with micron-level clearances, utilizing counter-rotation to propel gas from the inlet port toward the exhaust port. The unique profile design of the rotors-such as involute or circular arc profiles-determines the pumping efficiency; rotational speeds can reach 3,000–6,000 rpm, and a single-stage compression ratio can exceed 10:1.
Sealing Structure
Unlike oil-sealed pumps, dry pumps maintain vacuum integrity through a triple-layer sealing mechanism:
Labyrinth Seals: Multi-stage, tortuous channels located at the rotor ends utilize airflow resistance to block leakage.
Gas Barrier: Inert gas is injected into critical clearances to create a pneumatic pressure barrier.
Specialized Coatings: The rotor surfaces are coated with materials such as PEEK (polyether ether ketone), which provides both wear resistance and a reduced coefficient of friction.
These design features keep the leakage rate below 0.5 Pa·m³/s, thereby meeting the stringent cleanliness requirements of industries such as semiconductor manufacturing.
Cooling Module: The "Temperature Guardian" for Continuous Operation
Due to the absence of oil-based lubrication, dry pumps require an intelligent thermal management system:
Air Cooling: Aluminum alloy heat dissipation fins paired with a centrifugal fan dissipate up to 60% of the generated heat.
Water Cooling: An internal copper-tube water circulation loop provides heat exchange efficiency that is three times higher than that of air cooling.
Phase-Change Cooling: Certain models employ heat pipe technology, achieving a thermal conductivity rate up to 100 times greater than that of pure copper.
