Dry mechanical vacuum pumps have a wide range of applications, primarily in the following areas:
In the polysilicon preparation process within Low-Pressure Chemical Vapor Deposition (LPCVD) systems;
In semiconductor etching processes. These manufacturing processes frequently involve the use or generation of corrosive gases and abrasive particulates;
In certain particulate-generating processes-outside the semiconductor industry-where it is undesirable for particulates to mix with pump oil, and instead desirable for them to be expelled from the pump; specific types of dry mechanical vacuum pumps can be utilized to meet these requirements;
In distillation, drying, degassing, and packaging operations within the chemical, pharmaceutical, and food industries, where it is necessary to prevent contamination by organic solvents, dry vacuum pumps are the suitable choice;
As fore-pumps (roughing pumps) in general oil-free clean vacuum systems, to prevent oil contamination.
